Senior Systems Engineer, Advanced Automation & Robotics

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient.

Job Summary & Responsibilities

FEO is creating a Common EFEM (Equipment Front-End Module) platform that can be used across multiple Onto tools. We are hiring a Senior Systems Engineer to lead system-level definition and integration of the EFEM platform.

You will own system requirements and interfaces, system architecture, integration planning, and system-level validation. The work spans robotics, FOUP load ports, sensors, motion systems, environmental controls, safety, and control software.

• You often won’t have complete information. You should be able to state assumptions, identify risks, and choose tests that reduce uncertainty.
• Problems are usually harder than they look. You should expect iteration and plan for it.
• Progress is measured by results: a working integration, validated performance, reduced risk, and clear interfaces that teams can adopt.
• Clear thinking and clear communication are required. This role involves trade-offs and alignment across teams.

Responsibilities

System definition and architecture

• Define EFEM system requirements, functional specs, and interface definitions for use across multiple product families.
• Develop system architecture, module boundaries, and integration plans for:
  • robotics and wafer handling
  • FOUP load ports and related sensors
  • motion and precision positioning
  • lighting and sensing subsystems
  • airflow / environmental controls
  • safety systems
  • control software
• Set platform-level standards so the EFEM can be configured and reused without rework.

Integration leadership

• Lead integration across mechanical, electrical, software, robotics, and controls.
• Work with SMEs across robotics, motion control, safety, PCBA design, optics, and software controls to resolve interface and behavior issues.
• Define system-level metrics and acceptance criteria (throughput, placement accuracy, wafer flow reliability, environmental stability, contamination control).

Characterization and validation

• Create and execute system-level test plans for modules and integrated builds.
• Analyze data to find performance gaps (motion precision, handling reliability, vibration, thermal/environmental behavior, sensor performance).
• Drive root cause analysis and coordinate corrective actions across teams.

Standards and factory automation

• Ensure compliance with relevant SEMI standards (e.g., E84, E87, E90, E10, S2, S8) and EFEM automation requirements.
• Support interface specifications for AMHS, factory automation, and host control.
• Produce documentation needed for adoption: architecture notes, interface specs, test methods, and performance requirements.

Collaboration and technical leadership

• Work with product teams, NPI, and FEO module owners to ensure the platform fits multiple tool architectures.
• Present system behavior, trade-offs, risks, and design decisions to engineering and leadership.
• Mentor engineers on integration discipline, validation practices, and systems thinking.

Qualifications

Required

• BS or MS in Systems Engineering, Mechanical Engineering, Electrical Engineering, Robotics, Mechatronics, or related field.
• 8+ years in semiconductor capital equipment, robotics, mechatronics, precision automation, or other multidisciplinary systems.
• Experience defining system architecture, interfaces, and requirements for complex systems.
• Experience integrating robotics, precision motion, sensors, and controls into a working system.
• Familiarity with SEMI standards and factory automation interfaces used with EFEMs.
• Strong problem-solving skills using data, structured debugging, and clear written documentation.

Preferred

• Direct EFEM development experience (wafer-handling robotics, load ports, automation).
• Knowledge of contamination control, airflow management, environmental stability, and vibration mitigation.
• Experience with reliability methods (FMEA, structured root cause analysis) and platform engineering.
• Python, MATLAB, or similar tools for data analysis.

Why Join Onto Innovation?

At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized.

Compensation & Growth

• Base Salary Range:

• Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success.

Empowering Every Voice to Shape the Future:

Onto Innovation is committed to creating a workplace where every qualified candidate has an equal opportunity to succeed. We evaluate applicants based on skills, experience, and potential - without regard to race, color, religion, gender, sexual orientation, national origin, age, disability, veteran status, or any other characteristic protected by law. We believe diversity of thought and background drives innovation and strengthens our team.

Important Note on Export Compliance

For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3).